JPH0533823Y2 - - Google Patents
Info
- Publication number
- JPH0533823Y2 JPH0533823Y2 JP1063088U JP1063088U JPH0533823Y2 JP H0533823 Y2 JPH0533823 Y2 JP H0533823Y2 JP 1063088 U JP1063088 U JP 1063088U JP 1063088 U JP1063088 U JP 1063088U JP H0533823 Y2 JPH0533823 Y2 JP H0533823Y2
- Authority
- JP
- Japan
- Prior art keywords
- sealing
- soft metal
- thin film
- sealing surface
- coupling member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 38
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000003566 sealing material Substances 0.000 claims description 21
- 239000010409 thin film Substances 0.000 claims description 21
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims 1
- 230000007423 decrease Effects 0.000 description 7
- 239000007789 gas Substances 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Gasket Seals (AREA)
- Pressure Vessels And Lids Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1063088U JPH0533823Y2 (en]) | 1988-01-29 | 1988-01-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1063088U JPH0533823Y2 (en]) | 1988-01-29 | 1988-01-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01115062U JPH01115062U (en]) | 1989-08-02 |
JPH0533823Y2 true JPH0533823Y2 (en]) | 1993-08-27 |
Family
ID=31218459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1063088U Expired - Lifetime JPH0533823Y2 (en]) | 1988-01-29 | 1988-01-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0533823Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001227643A (ja) * | 2000-02-14 | 2001-08-24 | Tsukishima Kikai Co Ltd | 真空容器のシール構造および真空容器シール用ガスケット |
-
1988
- 1988-01-29 JP JP1063088U patent/JPH0533823Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01115062U (en]) | 1989-08-02 |
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